发明名称 METHOD FOR MANUFACTURING ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY
摘要 PURPOSE: A method for manufacturing an array substrate for an LCD(Liquid Crystal Display) is provided to crystallize the second transparent electrode without a separate PR(photoresist) pattern process by a laser and etch and remove only an amorphous electrode, thereby capable of patterning the second transparent electrode at every each pixel separately and obtaining a lower color filter pattern having no damage. CONSTITUTION: A gate wire(102) and a gate electrode(104) are formed on a substrate(100). A gate insulation film(106) is formed on the entire surface of the substrate(100) formed the gate wire(102) and the gate electrode(104). An active layer(108) and an ohmic contact layer(110) are formed on the gate insulation film(106). Cr or Mo is deposited on the entire surface of the substrate(100) and then patterned, thereby forming a source electrode(112) and a drain electrode(114) contacting to the ohmic contact layer(110), respectively, a data wire(116) connected to the source electrode(112) and an island shape source/drain metal layer(118) positioned on an upper portion of the gate wire(102). The second insulation film(120) is formed on the entire surface of the substrate(100) formed the source/drain electrodes(112,114). Accordingly, a thin film transistor(TFT) array portion is formed. A black matrix(124) is formed on the upper portion of the TFT(T), the data wire(116) and the gate wire(102). The third insulation film(126) is formed on the entire surface of the substrate(100) formed the black matrix(128). The first pixel electrode(128) positioned at a pixel region(P) is formed by depositing and patterning transparent conductive metal on the substrate(100) formed the third insulation film(126). At the plural pixel regions(P), color filters(130a,130b) are formed on the substrate(100) formed the first pixel electrode(128). A transparent electrode layer(132) is deposited on the substrate(100) formed the color filters(130a,130b). At the pixel region(P), the second pixel electrode(136) is formed on the upper portions of the color filter patterns(130a,130b).
申请公布号 KR20040050235(A) 申请公布日期 2004.06.16
申请号 KR20020078006 申请日期 2002.12.09
申请人 LG.PHILIPS LCD CO., LTD. 发明人 JANG, YUN GYEONG;KIM, UNG GWON
分类号 G02F1/1335;G02F1/1343;G02F1/1362;G02F1/1368;H01L21/28;H01L21/3205;H01L21/336;H01L23/52;H01L29/786;(IPC1-7):G02F1/133 主分类号 G02F1/1335
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