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发明名称
测量晶圆之零倾斜角度的方法
摘要
本发明系用来解决知技术只能在装机验机时进行晶圆倾斜角度归零,而不能在例行校正维修程序中确认晶圆之倾斜角度的缺失。本发明利用装机验机时在晶圆倾斜角度为零时所得到的配方程式为监测配方程式,并使用监测配方程式对倾斜角度大致为零之晶圆进行掺杂程序。最后,分析多数次掺杂程序之晶圆表面变化程度值与晶圆阻抗,偏差值最大之掺杂程序所对应到之晶圆即可视为零倾斜角度之晶圆。
申请公布号
TW200410351
申请公布日期
2004.06.16
申请号
TW091136202
申请日期
2002.12.13
申请人
中芯国际集成电路制造(上海)有限公司 SEMICONDUCTORMANUFACTURING INTERNATIONAL (SHANGHAI) CORP. 中国
发明人
杨金龙;何春雷
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
徐贵新
主权项
地址
中国
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