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发明名称
Micromechanical device and process for the manufacture of a micromechanical device
摘要
申请公布号
EP1228998(A3)
申请公布日期
2004.06.16
申请号
EP20010125720
申请日期
2001.10.27
申请人
ROBERT BOSCH GMBH
发明人
FISCHER, FRANK;HEIN, PETER, DR.;GRAF, ECKHARD
分类号
B81C99/00;B81B3/00;B81B7/00;B81C1/00;B81C3/00;(IPC1-7):B81B3/00
主分类号
B81C99/00
代理机构
代理人
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地址
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