| 摘要 |
PURPOSE: A port for mounting a wafer carrier in semiconductor fabricating equipment and an operating method thereof are provided to restrain the scratch of a wafer due to the malfunction of the semiconductor equipment by using two sensors installed at the wafer carrier loading port. CONSTITUTION: A port for mounting a wafer carrier in semiconductor fabricating equipment is provided with a table type port body(100) for mounting a wafer carrier, two grooves(102) formed on the surface of the port body for being inserted with a support part of the wafer carrier, and sensors(104a,104b) for detecting the loading state of the wafer carrier. At this time, the sensors are installed near the grooves. The sensor is capable of alarming when the pressing forces applied to the two grooves are different from each other.
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