| 摘要 |
PURPOSE: An apparatus is provided to reduce the space occupied by the apparatus by integrating a load lock chamber and a transfer chamber into a single chamber, while preventing a substrate from being warped. CONSTITUTION: An apparatus comprises a process chamber(130); a substrate supporting plate(136) arranged in the process chamber; a transfer chamber(120) for transferring a substrate(140) from an external source into the process chamber or transferring the substrate from the process chamber to the external source; a robot(122) arranged in the transfer chamber, and which has an arm(122a) moving between the process chamber and the transfer chamber so as to transfer the substrate; a lower elevating bar(160b) arranged in the portion deviated from the space formed beneath the substrate disposed on the arm of the robot, wherein the lower elevating bar has an end bent in a horizontal direction, and is arranged in the process chamber in such a manner that the lower elevating bar is rotatable centering from a vertical axis; an upper elevating bar(160a) arranged in the portion deviated from the space formed beneath the substrate disposed on the arm of the robot, wherein the upper elevating bar has an end bent in a horizontal direction, and is arranged in the process chamber in such a manner that the upper elevating bar is rotatable centering from the vertical axis and elevates to the place higher than the lower elevating bar; an inner elevating pin(150) arranged underneath the substrate disposed on the arm of the robot and disposed in the process chamber in such a manner that the inner elevating pin elevates, avoiding the arm; and a stand-by elevating bar(170) arranged in the portion deviated from the space formed beneath the substrate disposed on the arm of the robot, wherein the stand-by elevating bar has an end bent in a horizontal direction, and is arranged in the process chamber in such a manner that the stand-by elevating bar is rotatable centering from the vertical axis.
|
