| 摘要 |
PURPOSE: A sample holder is provided to reduce the weight of the sample holder and simplify a structure of the sample holder by forming a body part of the sample holder with an aluminum material. CONSTITUTION: A sample holder includes a body(110) and a plurality of fixing clips(130). A storage groove(120) is formed at a center of an upper part of the body in order to store a first sample(S1). The fixing clips are coupled to the upper part of the body along a circumference of the body. The fixing clips are used for fixing a plurality of second samples(S2), which are loaded, on the upper part of the body. The first sample is formed with a sectional sample for analyzing a cut side of a wafer. The second samples are formed with plane samples for analyzing a surface of a wafer.
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