PROBE STATION FOR SEMICONDUCTOR DEVICE TO CONTROL EASILY INTERNAL TEMPERATURE OF WAFER CHUCK AND STRUCTURE OF WAFER CHUCK

摘要

PURPOSE: A probe station for a semiconductor device to control easily internal temperature of a wafer chuck and a structure of a wafer chuck are provided to reduce a period of cooling the wafer chuck by using an external shielding unit for isolating the wafer chuck from the outside. CONSTITUTION: A wafer chuck(21) has a structure of a radiation plate in order to increase a contact area between the wafer chuck and the atmosphere and change rapidly temperature of the wafer chuck. The wafer chuck includes a plurality of bars. The bars are arranged nearly to a center part of the wafer chuck. The bars are connected to the center part of the wafer chuck. The bars are arranged in parallel to the first direction. The center part of the bars is formed with the same metal alloy. The wafer chuck has a symmetric structure on the basis of the center part.