METHOD FOR MEASURING CENTER POSITION OF FIDUCIAL MARK

摘要

PURPOSE: A method for measuring a center position of a fiducial mark is provided to calculate accurately the center position of the fiducial mark as much as sub-pixel units without using the standard pattern information and the geometric information. CONSTITUTION: A method for measuring a center position of a fiducial mark includes a target region calculation process, a mark range calculation process, a pixel unit center calculation process, and a sub-pixel unit center calculation process. The target region calculation process is performed to calculate a target region including a fiducial mark of an image(100). The mark range calculation process is performed to calculate a predetermined region including the fiducial mark within the target region(200). The pixel unit center calculation process is performed to calculate a center position of the fiducial mark as accuracy of unit pixel within the predetermined region(300). The sub-pixel unit center calculation process is performed to calculate the center position of the fiducial mark as the accuracy of sub-pixel(400).