发明名称 |
METHOD FOR FABRICATING OPTICAL FIBER FIXING ALIGNMENT DEVICE USING PHOTORESIST |
摘要 |
PURPOSE: A method for fabricating an optical fiber fixing alignment device using a photoresist is provided to align and combine an optical element and an optical fiber accurately and easily using a MEMS technology. CONSTITUTION: According to the method for fabricating a fixing alignment device capable of fixing a micro optical element like an optical fiber(12) to a micro optical element(11a,11b,11c), a photoresist is coated on a back of the micro optical element. A required part is exposed by a photolithography process using a photo mask, and then the unnecessary photoresist is removed through development, and thus the fixing alignment device having a micro gap is fabricated.
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申请公布号 |
KR20040050503(A) |
申请公布日期 |
2004.06.16 |
申请号 |
KR20020078354 |
申请日期 |
2002.12.10 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE;KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
LEE, JUN SEOP;MUN, SEONG UK;SHIN, HYEON JUN |
分类号 |
G02B6/36;(IPC1-7):G02B6/36 |
主分类号 |
G02B6/36 |
代理机构 |
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