发明名称 METHOD FOR FABRICATING OPTICAL FIBER FIXING ALIGNMENT DEVICE USING PHOTORESIST
摘要 PURPOSE: A method for fabricating an optical fiber fixing alignment device using a photoresist is provided to align and combine an optical element and an optical fiber accurately and easily using a MEMS technology. CONSTITUTION: According to the method for fabricating a fixing alignment device capable of fixing a micro optical element like an optical fiber(12) to a micro optical element(11a,11b,11c), a photoresist is coated on a back of the micro optical element. A required part is exposed by a photolithography process using a photo mask, and then the unnecessary photoresist is removed through development, and thus the fixing alignment device having a micro gap is fabricated.
申请公布号 KR20040050503(A) 申请公布日期 2004.06.16
申请号 KR20020078354 申请日期 2002.12.10
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE;KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 LEE, JUN SEOP;MUN, SEONG UK;SHIN, HYEON JUN
分类号 G02B6/36;(IPC1-7):G02B6/36 主分类号 G02B6/36
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