Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step,申请号EP20010128161-传众专利搜索

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发明名称	Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step
摘要
申请公布号	EP1213259(A3)	申请公布日期	2004.06.16
申请号	EP20010128161	申请日期	2001.11.27
申请人	MICROSCAN SYSTEMS INCORPORATED;XEROX CORPORATION	发明人	ZOSEL, ANDREW J.;GULVIN, PETER M.;CHEN, JINGKUANG;KUBBY, JOEL A.;LIN, CHUANG-CHIA;TRAN, ALEX T.
分类号	B81C1/00;B81B3/00;G02B26/08;H01L21/302;H01L21/306;H01L21/3065;H01L21/762;H01L27/14;(IPC1-7):B81B3/00	主分类号	B81C1/00
代理机构		代理人
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