| 摘要 |
PURPOSE: An overlay box for forming a metal line is provided to exactly align a tungsten plug and a metal line by using a micro groove formed at the outer portion of a main box. CONSTITUTION: An overlay box(42) for forming a metal line is used for checking the overlay between a tungsten plug and a metal line. The overlay box is provided with a main box(42a) and a groove(42b) spaced apart from the main box. The width of the main box is 20 μm. The width of the groove is in the range of 4-6 μm. The groove is spaced apart from the main box as much as 4-6 μm. The groove is like a photo frame.
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