发明名称 |
Polymers and photoresist compositions |
摘要 |
The present invention provides novel polymers and chemically-amplified positive-acting photoresist compositions that contain such polymers as a resin binder component. Preferred polymers of the invention include one or more structural groups that are capable of reducing the temperature required for effective deprotection of acid-labile moieties of the polymer.
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申请公布号 |
US6749983(B1) |
申请公布日期 |
2004.06.15 |
申请号 |
US19990330418 |
申请日期 |
1999.06.11 |
申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
TAYLOR GARY N.;SZMANDA CHARLES R. |
分类号 |
C08F220/16;C08F220/18;C08K5/42;G03F7/004;G03F7/039;H01L21/027;(IPC1-7):G03C1/73;G03C1/76 |
主分类号 |
C08F220/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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