发明名称 Water tank, cooling tower including the same and method of manufacturing semiconductor device
摘要 A water tank includes a bottom surface having a suction opening for draining water, and an air-suction preventing member covering the suction opening, spaced with a gap allowing water to flow into the suction opening, above the bottom surface. The air-suction preventing member is so arranged as to interrupt suction of air by the suction opening due to generation of a vortex at the suction opening. The arrangement provides a water tank free of any possible failure and having a simple structure not increasing weight and cost, preventing the air from being sucked in.
申请公布号 US6748972(B2) 申请公布日期 2004.06.15
申请号 US20010839375 申请日期 2001.04.23
申请人 RENESAS TECHNOLOGY CORP. 发明人 WATANABE MITSUAKI
分类号 F25D17/02;F28F25/02;F28F25/04;H01L21/00;(IPC1-7):F17D1/20 主分类号 F25D17/02
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