发明名称 Photoresist strippers containing reducing agents to reduce metal corrosion
摘要 Alkaline photoresist stripping compositions containing a reducing agent to reduce or inhibit metal corrosion are disclosed. Reducing agents include compounds containing reactive multiple bonds, hydrazine and derivatives thereof, oximes, hydroquinone, pyrogallol, gallic acid and esters thereof, tocopherol, 6-hydroxy-2,5,7,8-tetramethylchroman-2-carboxylic acid, BHT, BHA, 2,6-di-tert-butyl-4-hydroxymethyl-phenol, thiols, salicylaldehyde, 4-hydroxybenzaldehyde and glycol aldehyde dialkylacetals.
申请公布号 US6749998(B2) 申请公布日期 2004.06.15
申请号 US20010968665 申请日期 2001.10.02
申请人 MALLINCKRODT BAKER INC. 发明人 SCHWARTZKOPF GEORGE;SURENDRAN GEETHA
分类号 C23F11/12;C23F11/14;C23F11/16;G03F7/42;H01L21/027;(IPC1-7):G03F7/42 主分类号 C23F11/12
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