发明名称 Method for making programmable resistance memory element
摘要 A method of making an electrically operated programmable resistance memory element. A sidewall spacer is used as a mask to form raised portions on an edge of a conductive sidewall layer. The modified conductive sidewall layer is used as an electrode for the memory element.
申请公布号 US6750079(B2) 申请公布日期 2004.06.15
申请号 US20010891157 申请日期 2001.06.26
申请人 OVONYX, INC. 发明人 LOWREY TYLER;KLERSY PATRICK;HUDGENS STEPHEN J.;MAIMON JON
分类号 G11C11/56;H01L27/24;H01L45/00;(IPC1-7):H01L21/00 主分类号 G11C11/56
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