| 摘要 |
PURPOSE: A cold cathode ionization gauge is provided to provide a current sensor for generating and outputting high voltage, which is included in the cold cathode ionization gauge, by using a log amplification circuit. CONSTITUTION: A cold cathode ionization gauge includes a dual voltage(105), a high voltage circuit part(101), an output voltage adjustment part(111), a current restricting part(109), a high-speed switching part(113), and an output current sensor(107). The current sensor for generating and outputting high voltage receives four-bit signals from a controller. The current sensor generates voltage of 3300Vdc, 2000Vdc, 1500Vdc, and 800Vdc. The output voltage adjustment part(111) is connected to a front end of the transformer(103). The high-speed switching part(113) is connected to the transformer(103).
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