EXPOSURE DEVICE FOR CARRYING OUT EXPOSURE WITH HIGH EFFICIENCY AND PRECISION

摘要

PURPOSE: An exposure device is provided to solve problems related with conventional pressurizing film-based technology, including an increase in the size and weight of a device, deterioration in exposure caused by glass and fracture of glass. CONSTITUTION: The exposure device comprises a platen for supporting an object to be exposed and a mask support member(30) for supporting a mask containing the content of exposure to be implemented on the object. The exposure device further comprises: a depressurization chamber for housing the mask support member and the platen and maintaining a pressure lower than the ambient pressure; a pressurizing film(1) forming one surface of the walls of the depressurization chamber, and providing a protrusion through the expansion toward the inside of the depressurization chamber as the pressure inside of the chamber is decreased; and a moving member(41) that causes the film mask(3) on the mask support member(30) and the object on the platen to be closely contacted with each other when they are pushed by the expanded and protruded pressurizing film(1).