发明名称 ATMOSPHERIC PLASMA SURFACE PROCESS SYSTEM USING ABSORPTION TYPE GAS FLOATING METHOD AND PROCESSING METHOD THEREOF
摘要 PURPOSE: An atmospheric plasma surface process system using an absorption type gas floating method and a processing method thereof are provided to prevent the outflow of harmful gases by using a low-priced atmospheric pump. CONSTITUTION: An atmospheric plasma surface process system using an absorption type gas floating method includes a high-voltage electrode, a ground electrode, a gas floating tube, and an atmospheric pump. The high-voltage electrode(1) is connected to a power supply unit. The ground electrode(2) is opposite to the high-voltage electrode. The gas floating tube(6) is used for connecting the high-voltage electrode and the ground electrode to a resolution catalyst unit(7). The atmospheric pump(8) is connected to the resolution catalyst unit.
申请公布号 KR20040049518(A) 申请公布日期 2004.06.12
申请号 KR20020077315 申请日期 2002.12.06
申请人 P.S.M CO., LTD. 发明人 BAEK, JONG MUN;KIM, DONG HUN;LEE, GEUN HO;LEE, GI HUN;LEE, HAE RYONG
分类号 H05H1/00;(IPC1-7):H05H1/00 主分类号 H05H1/00
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