发明名称 |
ATMOSPHERIC PLASMA SURFACE PROCESS SYSTEM USING ABSORPTION TYPE GAS FLOATING METHOD AND PROCESSING METHOD THEREOF |
摘要 |
PURPOSE: An atmospheric plasma surface process system using an absorption type gas floating method and a processing method thereof are provided to prevent the outflow of harmful gases by using a low-priced atmospheric pump. CONSTITUTION: An atmospheric plasma surface process system using an absorption type gas floating method includes a high-voltage electrode, a ground electrode, a gas floating tube, and an atmospheric pump. The high-voltage electrode(1) is connected to a power supply unit. The ground electrode(2) is opposite to the high-voltage electrode. The gas floating tube(6) is used for connecting the high-voltage electrode and the ground electrode to a resolution catalyst unit(7). The atmospheric pump(8) is connected to the resolution catalyst unit.
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申请公布号 |
KR20040049518(A) |
申请公布日期 |
2004.06.12 |
申请号 |
KR20020077315 |
申请日期 |
2002.12.06 |
申请人 |
P.S.M CO., LTD. |
发明人 |
BAEK, JONG MUN;KIM, DONG HUN;LEE, GEUN HO;LEE, GI HUN;LEE, HAE RYONG |
分类号 |
H05H1/00;(IPC1-7):H05H1/00 |
主分类号 |
H05H1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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