| 摘要 |
PURPOSE: A manual blade for an exposure apparatus is provided to reduce a mismatch of a photo margin between a dense line/space and an isolated line/space and increase the first light efficiency in the Y-axis direction by 11.2 percent by forming a blade of a MIX(modified illumination dipole X-axis) 110-degree open structure. CONSTITUTION: In the manual blade for the exposure apparatus, open regions of a dipole type are formed in a degree of 110, symmetrical to each other so that the efficiency of the first light is increased in the Y-axis direction as well as in the X-axis direction.
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