发明名称 Multi-layer structure production of semiconductor materials with different mesh parameters comprises epitaxy of thin film on support substrate and adhesion on target substrate
摘要 The production of a multi-layer structure of semiconductor materials comprises: (a) the production of a layer (110) incorporating a superficial thin film on a support substrate (100); (b) the creation of a fragilisation (sic) zone in the assembly (10) formed by the support substrate and the thin film deposited; (c) the adhesion of the assembly with a target substrate (20); (d) the detachment at the level of the fragilisation zone; and (e) the treatment of the surface of the structure thus obtained.
申请公布号 FR2848334(A1) 申请公布日期 2004.06.11
申请号 FR20020015499 申请日期 2002.12.06
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES 发明人 MAZURE CARLOS
分类号 H01L21/20;H01L21/762;(IPC1-7):H01L21/20 主分类号 H01L21/20
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