发明名称 |
Multi-layer structure production of semiconductor materials with different mesh parameters comprises epitaxy of thin film on support substrate and adhesion on target substrate |
摘要 |
The production of a multi-layer structure of semiconductor materials comprises: (a) the production of a layer (110) incorporating a superficial thin film on a support substrate (100); (b) the creation of a fragilisation (sic) zone in the assembly (10) formed by the support substrate and the thin film deposited; (c) the adhesion of the assembly with a target substrate (20); (d) the detachment at the level of the fragilisation zone; and (e) the treatment of the surface of the structure thus obtained.
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申请公布号 |
FR2848334(A1) |
申请公布日期 |
2004.06.11 |
申请号 |
FR20020015499 |
申请日期 |
2002.12.06 |
申请人 |
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES |
发明人 |
MAZURE CARLOS |
分类号 |
H01L21/20;H01L21/762;(IPC1-7):H01L21/20 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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