Micro machined accelerator, has seismic mobile mass displaced along one axis under effect of acceleration amplified by amplification unit, and resonator that vibrates and being compressed based on acceleration direction

摘要

The accelerometer has a gauge cell with a seismic mobile mass (1) connected to a base. The mass is displaced along an axis (Oy) of the accelerometer under the effect of acceleration along the axis (Oy). A resonator cell has a resonator (30) vibrating and being compressed based on the direction of acceleration. The gauge cell has an amplification unit (2) amplifying the force of acceleration generating the mass transfer.