| 摘要 |
PROBLEM TO BE SOLVED: To realize an IC tester and testing modules capable of performing failure analysis and repair work rapidly. SOLUTION: This is an improved IC tester for testing a test object by a plurality of testing modules. This device is prepared for each testing module, and has a module memory unit which stores at least either diagnostic data or correction data, performs at least one of diagnosis and correction of the testing module, and stores the diagnostic data or correction data in the module memory unit. COPYRIGHT: (C)2004,JPO
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