发明名称 METHOD AND DEVICE FOR POSITIONING
摘要 PROBLEM TO BE SOLVED: To stably position a work. SOLUTION: This device includes an upper plate 81 and a lower plate 90 slidably supported and overlapping, and drive units 102, 103 sliding the upper plate 81 and the lower plate 90 in a Y1-Y2 direction. Square open windows 82, 91 are formed on the upper plate 81 and the lower plate 90 with arranged in a matrix shape. The open window 82 and the open window 91 overlap to form an opening part 85. The upper plate 81 and the lower plate 90 are slid under a condition that the opening part 85 surrounds a cap main body 52 and the cap main body 52 is caught between an edge of the open window 82 and an edge of the open window 91 to carry out positioning. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004160627(A) 申请公布日期 2004.06.10
申请号 JP20020332280 申请日期 2002.11.15
申请人 SHINKO ELECTRIC IND CO LTD 发明人 YAMASHITA SEIJI
分类号 B23P19/00;H01L21/50;(IPC1-7):B23P19/00 主分类号 B23P19/00
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