| 摘要 |
<p>A metal heater capable of quick heating with little variation in the temperature of a semiconductor wafer or the like during heating and having no possibility of metal sheets being warped or distorted. The metal heater is characterized by comprising a plurality of metal sheets and a heating element, the heating element being held between the metal sheets, the thickness of the metal sheet on the heating surface side being equal to or greater than that of the metal sheet on the side opposite to the heating surface.</p> |
