| 摘要 |
PROBLEM TO BE SOLVED: To prevent change in position when a semiconductor aligner is reset with a static pressure guide stage thereof and the power supply is turned OFF. SOLUTION: The conditions of air when the apparatus is reset and the power supply is turned OFF is divided into two conditions by using a self-holding type electromagnetic valve in the static pressure guide stage, in addition to a normally-opening electromagnetic valve for air control. Change in position other than that during the control of stage is prevented by controlling such two kinds of conditions. COPYRIGHT: (C)2004,JPO |
