| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method wherein the yield of photoelectric transducers is improved by preventing static electricity from entry via terminal sections by segmenting the glass of photoelectric transducers from the glass-made sections of other parts after the connection of a TCP and a PCB. SOLUTION: In this X-ray imaging apparatus comprising a plurality of picture elements, each having a photoelectric transducer and a switch element connected thereto is two-dimensionally arranged on a substrate. The photoelectric transducers substrate is segmented at the rear surface, with a flexible substrate in which an integrated circuit is mounted at the photoelectric transducer terminals. Because the TCP or the PCB is connected before glass is segmented, no terminals formed near the photoelectric transducers are exposed, and the processing of the glass substrate in this way prevents static damage to photoelectric transducers. COPYRIGHT: (C)2004,JPO
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