| 摘要 |
PROBLEM TO BE SOLVED: To improve efficiency in manufacturing optical parts while maintaining accuracy in measuring the surface state of a specimen made of the optical parts in an interferometer apparatus for measuring its surface state. SOLUTION: The interferometer apparatus is provided with both an interferometer body 3 and an installation base 5 having a mounting part 43 provided for an upper part 3a of the interferometer body 3 for mounting the specimen 2 made of the optical parts at a location vertically fixed to the interferometer body 3. The interferometer body 3 is provided with a laser optical system for making laser light incident onto a surface to be inspected 2a of the specimen 2; a reference optical system having a reference surface 9a arranged below the specimen 2 for creating reference light by reflecting part of the laser light; and an observation part for observing both the reference light and interference fringes generated by the light to be inspected reflected at the surface to be inspected 2a. The installation base 5 is provided with a stage part 41 for moving the specimen 2 in directions which intersect with the optical axis of the laser light. COPYRIGHT: (C)2004,JPO
|
