VACUUM MOUNTING METHOD AND DEVICE FOR MEMS (MICRO ELECTRO MECHANICAL SYSTEM) ON SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a vacuum mounting method and a device for MEMS on a substrate where the vacuum is controlled at a desired level and maintained at an original vacuum level even after a specified time. SOLUTION: A semiconductor substrate 30 where many MEMSs are formed and a lid member 20 consisting of a glass plate where a getter is adhered to a cavity are mutually faced in a vacuum chamber, and then a inert gas is provided from a gas injecting part connected to the vacuum chamber. The vacuum is controlled to be a specified level by controlling the gas injecting part 120 and a gas exhausting part 150. When the vacuum is stabilized, the lid member 20 is heated and then the semiconductor substrate 30 and the lid member 20 are bonded by applying a high voltage to the lid member under a condition that the lid member is heated at a specified temperature. COPYRIGHT: (C)2004,JPO