| 摘要 |
PROBLEM TO BE SOLVED: To effectively utilize concentrated drainage in a deionization part in the production of pure water, to secure the purity of pure water as well, and further, to make the apparatus compact. SOLUTION: The pure water production apparatus 1 is provided with a deionization part 2 where ions in the water to be treated are removed, a membrane type degassing part 3 where dissolved gas in the water to be treated is degassed, and a water sealed vacuum pump 4 attached to the the membrane type degassing part 3. The apparatus is further provided with a sealing water introduction means 5 for using concentrated drainage in the deionization part 2 as sealing water in the water sealed vacuum pump 4. COPYRIGHT: (C)2004,JPO
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