| 摘要 |
A method for quality control of a body comprising an optical raw material and for optimizing its being cut apart into optical elements is described, in which optical discontinuities in the body are detected and the optical elements are cut from those body parts that have as few discontinuities as possible or are essentially free of discontinuities. The method is distinguished in that the three-dimensional shape of the body is detected by means of three-dimensional geometry recognition in a coordinate system, and the optical properties of the body are detected, in body planes located above the other and formed of pixels, by means of scanning radiation, and from that, a three-dimensional image of the optical properties of the body is generated. The optical elements obtained by the method are suitable for DUV lithography, among other purposes.
|
