| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To efficiently emit the Joule heat generated in a core layer to a semiconductor substrate. <P>SOLUTION: The optical waveguide type semiconductor optical device has an optical waveguide comprising at least a core layer 3 having at least a function of absorbing light and a clad layer 2 on a semiconductor substrate 1, and in the device, while the light entering the entrance end face propagates the optical waveguide, the light is absorbed to generate a photo current. In order to avoid thermal breakdown due to the Joule heat caused by the generated photo current, a semiconductor part 15 for heat conduction is formed in contact with the side faces of the core layer parallel to the propagation direction of the light and in contact with the upper face of the semiconductor substrate so as to emit the heat to the semiconductor substrate, and the width W of the semiconductor part for heat conduction, orthogonal to the propagation direction of the light, is gradually decreased along the propagation direction of the light. <P>COPYRIGHT: (C)2004,JPO</p> |
