| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect the positional information of a mobile object withtout being limited by the arrangement of a device adjacent to a projection optical system. SOLUTION: The stage equipment is provided with the mobile object 10 that is movable in at least a first direction. In addition, it is provided with first and second reflection surfaces M1 and M2 that are provided on the mobile object 10 and are directed in a direction crossing the first direction and in different directions with each other, an irradiation equipment 62 that emits a first detection light to the first reflection surface M1 and a second detection light to the second reflection surface M2 respectively, and a detector 63 that detects the positional information of the mobile object 10 in the first direction on the basis of the result of the received first and second detection lights reflecting on the first and the second reflection surfaces M1 and M2. COPYRIGHT: (C)2004,JPO |
