| 摘要 |
PROBLEM TO BE SOLVED: To control vibration from an installation floor without inducing cost increase to the production factory. SOLUTION: The main unit SP of an aligner for exposing a pattern is installed in an installation part B. It is provided with a first supporting device BP that is provided between the main unit SP and the installation part B and supports at least a part of the main unit SP, and a second supporting device PM that is provided between the first supporting device BP and the installation part B and controls vibration generating on the installation part B. COPYRIGHT: (C)2004,JPO |
