| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a high performance probe for a near-field microscope easily manufactured and having high shape repeatability. SOLUTION: The method for manufacturing the optical propagation element probe comprises an optical propagation element sharpening process S1 for forming a sharpened part 7 in an optical fiber 1, a hook shape forming process S2 for forming a hook shape near the sharpened part 7 in the optical propagation element, a metal film coating process S3 for forming a transmission opening 8 at a tip 8, a process S4 for protecting the transmission opening 8 by using a resist material, a reflection face forming process S5 for forming a reflection face 5 for a optical lever, a spring function part metal film coating process S6 for forming a metal film coating on a spring function part 10 behind a hook shape part and a resist material removing process S7 for removing the resist material for protecting the transmission opening 8. COPYRIGHT: (C)2004,JPO |
