METHOD AND DEVICE FOR DATA EXTRACTION, METHOD AND DEVICE FOR POSITION DETECTION AND ALIGNER

摘要

PROBLEM TO BE SOLVED: To provide a data extraction method and its device which can extract data of an extraction object highly precisely. SOLUTION: A model estimation device 54 obtains a second probability density function of minimum Kulback-Leibler information amount which shows the gap of the model to a probability distribution model (first probability distribution model) to frequency distribution of the luminance value of the entire of an imaging data IMD2, in the range of possible illuminance values of background among some probability density functions estimated based on normal distribution of the luminance value of a part which is clearly a background. A threshold decision device 55 decides the threshold of the luminance value between a light source image and its background based on frequency distribution of the luminance value of background prepared based on the second probability density function, and an extraction device 56 extracts each picture element to the light source image from the imaging data IMD2 by binarizing the imaging data IMD2 by using the threshold. COPYRIGHT: (C)2004,JPO