LOCAL CLEANING TRANSFER CHAMBER AND LOCAL CLEANING TREATMENT EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a local cleaning transfer chamber and local cleaning treatment equipment that can easily adjust atmospheric pressure inside a transfer room and maintain a clean environment without sharply increasing the amount of blast. SOLUTION: The local cleaning transfer chamber comprises a number of openings that are provided on the floor surface of a wafer transfer chamber while a hand ring unit is sandwiched and discharge air from a fan filter unit, and an opening ratio adjustment mechanism that covers at least one portion of the openings and adjusts the opening ratio. COPYRIGHT: (C)2004,JPO