| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro actuator with a mechanism for holding an operating part in an operated position even with the power turned off. SOLUTION: This micro actuator includes: at least one charged body 6 provided with insulation films 5, 7 set on the surface of a transistor 1 having a source terminal 2, a drain terminal 3 and a channel 4; and the operating part 8 disposed in a position 1 at a designated distance from the charged body 6 and insulated from the transistor 1. The operating part 8 moves from a position 1 to a position 2 coming into contact with or close to the charged body 6, an electric current is let flow through the channel 4, voltage is applied to the drain 3 and the operating part 8, the charged body 6 is charged by a tunnel current from the channel 4, and the operating part 8 is held in the position 2 by electrostatic attracting force generated between the charged body 6 and the operating part 8 by the above charging. COPYRIGHT: (C)2004,JPO
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