| 摘要 |
A bonding apparatus which bonds two substrates together with a sealing agent applied to, in the form of a frame, on one of the substrates. The apparatus comprises a first retaining table having a retaining surface which retains a first substrate thereon, a second retaining table opposed to the first retaining table and having a retaining surface which retains a second substrate thereon, a nonviscous elastic material provided on that part of the retaining surface of at least one of the retaining tables which retains the substrate thereon, and first and second drive sources which relatively drive the first and second retaining tables in the vertical direction so that the substrates on the respective retaining surfaces of the retaining tables are bonded together with the sealing agent.
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