发明名称 Ceramic heater having a resistant heater element
摘要 A heater includes a plate having a heating surface for heating an object to be heated and a resistant heater element provided in the plate. This resistant heater element includes a continuous wiring pattern with a plurality of flexures and including a thermal uniform pattern part which improves thermal uniformity. If the resistant heater element includes a continuous wiring pattern with a plurality of folding parts as the flexures, a space between wirings before folding and after folding with respect to each of the folding parts is approximately the same as a width L3 in a region other than the folding part and the vicinity thereof and is made wider than the width L3 at the folding part and in the vicinity thereof.
申请公布号 US2004108308(A1) 申请公布日期 2004.06.10
申请号 US20030657806 申请日期 2003.09.08
申请人 NGK INSULATORS, LTD. 发明人 OKAJIMA HISAKAZU
分类号 H05B3/10;C23C14/50;C23C16/46;H01L21/00;H01L21/3065;H01L21/31;H05B3/02;H05B3/14;H05B3/74;(IPC1-7):H05B3/68 主分类号 H05B3/10
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