| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron source manufacturing device with a reduced size and reduced moisture absorption into an inner wall of a vacuum container, suitable for productivity with improved production speed, capable of evacuating in a short time. <P>SOLUTION: The electron source manufacturing device is provided with an air flow generating means 2 forming an air curtain between a lifted vacuum container 1 and a substrate 3. The air curtain generated by the air flow generating means has a velocity vector in a direction almost perpendicular to the substrate located at the position where the air curtain blows. The more air molecules having the velocity vector in the vertical direction forming the air curtain, the more effective a blocking function of the air curtain becomes. However, because of the existence of the substrate with which the air curtain collides, the air molecules having the velocity vector in the vertical direction is reduced by the recoil of the air molecules hitting the base board. Namely, the blocking function of the air curtain is lowered and intrusion of water molecules into the vacuum container is increased. Accordingly, an upper limit of the velocity of the air curtain is set. <P>COPYRIGHT: (C)2004,JPO</p> |
