METHOD FOR MANUFACTURING SUBSTRATE HOLDER, SUBSTRATE TRAY, STAGE EQUIPMENT AND SUBSTRATE HOLDER

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate holder, a substrate tray, a storage device and a substrate holder capable of flexibly facilitating response even to the change of shape corresponding to the change of the substrate size without making it necessary to use any large-scaled or highly precise machine tool in the initial stage of a manufacturing process. SOLUTION: A substrate holder 7 is provided with a substrate holding part 10 for holding a substrate P, and the substrate holding part 10 is provided with a plurality of holding members 12a to 12h for holding the substrate P. COPYRIGHT: (C)2004,JPO