| 摘要 |
PROBLEM TO BE SOLVED: To surely adsorb a deformed material to be adsorbed in an adsorbing device adsorbing the adsorbed material such as a wafer and in a transport device using the adsorbing device. SOLUTION: The adsorbing device is provided with an adsorbing part which is formed in a main body and has an adsorption hole, and a flat pad which is fixed to the adsorbing part and abuts on the adsorbing member. The pad has a hole connected to the adsorption hole, and an elastically deformed part is formed at an outer peripheral part. The transport device is provided with a transport arm which can move into a cassette where a plurality of wafers are stored and has an adsorbing part for adsorbing the wafer, a flat pad which is fixed to the adsorbing part of the transport arm and abuts on the wafer, and a driving means for moving the transport arm and carrying out the wafer from the cassette part or carrying it in the cassette. The adsorbing part has an adsorption hole and the pad has a hole connected to the adsorption hole. An elastically deformed part is formed at an outer peripheral part. COPYRIGHT: (C)2004,JPO |
