METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal display device which prevents contact between Al and ITO (Indium Tin Oxide) for higher reliability of elements. SOLUTION: The method for manufacturing the liquid crystal display device includes stages of: respectively forming gate electrodes and gate pads 2 respectively on a substrate; successively forming an insulating film and a semiconductor film over the entire surface of the substrate; forming semiconductor film patterns to transistor (TR) sections 5 by secondary photoetching of the semiconductor film; forming a metallic film over the entire surface of the substrate; forming source electrodes and drain electrodes in the TR sections 5 by ternary photoetching of the metallic film 5; and forming a protective film over the entire surface of the substrate. The method further includes stages of: opening contact holes for exposing the drain electrode surfaces and gate pad 2 surfaces to a side inner than the gate pads 2 by quaternary photoetching of the protective film and the insulating film; forming an ITO film over the entire surface of the substrate formed with the contact holes; and forming pixel electrodes 6 connected to the drain electrodes and the gate pads 2 by quinary photoetching of the ITO film. COPYRIGHT: (C)2004,JPO