| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a stamper for an optical disk and a substrate for the disk for manufacturing the disk having a small variation in the reflectance and a high recording characteristic without any defect. SOLUTION: Before forming a conductive film 6 on a surface of a photoresist layer 1, a post-exposure/cleaning baking for the photoresist layer 1 is not performed, then, a ultraviolet ray irradiation is performed in an inactive gas such as a nitrogen gas or an argon gas. COPYRIGHT: (C)2004,JPO
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