发明名称 |
MANUFACTURING DATA RECORDING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive manufacturing data recording device capable of compressing the monitoring data of a manufacturing apparatus quickly for storing with a small capacity of storage. SOLUTION: The manufacture data recording device comprises a sampling section for sampling an analog signal representing a measurement value or a setting value, and changes with time at a first time interval for converting to digital data; a first data storage section for temporarily storing the digital data; a record interval derivation section for deriving a second time interval longer than the first one from setting data for production; a data compression section for inputting the second time interval, reading a plurality of digital data sampled during the second time interval from the first data storage section, and creating the compressed data at the second time interval from characteristics in the plurality of digital data sampled during the second time interval; and a second data storage section for storing the compressed data. COPYRIGHT: (C)2004,JPO
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申请公布号 |
JP2004165334(A) |
申请公布日期 |
2004.06.10 |
申请号 |
JP20020328001 |
申请日期 |
2002.11.12 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
MINAMIDA YUKIHIRO;YOSHINAGA MITSUHIRO |
分类号 |
H01L21/66;H01L21/02;(IPC1-7):H01L21/02 |
主分类号 |
H01L21/66 |
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