| 摘要 |
PROBLEM TO BE SOLVED: To emit primary X-rays toward a lower one-portion of a sample to conduct X-ray analysis for the portion. SOLUTION: The lower one-portion of the sample 10 is analyzed by the X-ray using an X-ray analyzer provided with a mounting table 3 having an X-ray transmission window 4 closed by a diaphragm transmitting the X-ray, and arranged with the sample 10 in an upper side of the X-ray transmission window 4, an X-ray source 2 arranged in a lower side of the table 3, an X-ray guide tube 5 for guiding the primary X-ray generated from the X-ray source 2 to the X-ray transmission window 4, a detecting means 7 arranged in the lower side of the table 3 to detect a secondary X-ray generated by irradiation of the primary X-ray to the sample 10 in the upper side of the X-ray transmission window 4, an image picking-up means 15 for imaging the sample 10 from the direction coaxial to an irradiation direction of the primary X-ray to the X-ray transmission window 4, and a display means 17 for displaying an image imaged by the image picking-up means 15. COPYRIGHT: (C)2004,JPO
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