| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent the generation of particles and avoid the risk of oxygen deficiency by removing moisture and an organic material in a transfer space and suppressing the growth of a natural oxide film on an object to be treated. <P>SOLUTION: The dry air feeding device and the treatment apparatus are provided with two rotors 18, 18b carrying an adsorbent, each rotor supported rotatably with a supporting frame 16, whose rotation area is compartmentalized into at least an adsorbing zone S and a regeneration zone U with a partition member 17 installed to the supporting frame 16, a common motor 19 to rotate the two rotors, a circulation path 20 for introducing into the target space dry air whose moisture and organic material are removed by feeding the air aspirated from the target space through the adsorbing zones S of each rotor in order, and a gas discharge path 21 for separating the moisture and the organic material from the adsorbent by heating part of the dry air and feeding the same through the regeneration zones U of each rotor. The adsorbent is composed of a rare-earth substitution aluminosilicate made from a hydrophilic zeolite with part of sodium substituted with rare-earth elements. <P>COPYRIGHT: (C)2004,JPO</p> |
