| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer for miniaturizing an apparatus and preventing the occurrence of interference fringes caused by the dustproof measures of an image pickup device. SOLUTION: The imaging surface of the image pickup device 120 is illuminated with first reflection light on a reference surface 113a of a reference lens 113 and second one on a measuring surface 300a of a lens 300 to be inspected that transmit through a collimator lens 114 and a beam splitter 117 and the interference fringes are formed on the imaging surface. In this case, a concave lens 115 is arranged between the collimator lens 114 and the imaging surface and a second main point of the optical system comprising the collimator lens 114 and the concave lens 115 is positioned between the collimator lens 114 and the reference lens 113, thus shortening the focus distance of the collimator lens 114 and miniaturizing the apparatus. COPYRIGHT: (C)2004,JPO
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