| 摘要 |
PROBLEM TO BE SOLVED: To provide a moving table arranged on a fixed base, which is movable in left/right and front/rear directions, and horizontally turnable with respect to the fixed base. SOLUTION: X/Y guide units wherein a lower X-axis guide rail, an X-axis housing, and a Y-axis guide rail are sequentially stacked are dividedly arranged frontward and rearward from the table center. The respective lower X-axis guide rails are fixed parallel to the X-axes. X/Y guide units wherein a lower Y-axis guide rail, a Y-axis housing, and a X-axis guide rail are sequentially stacked are dividedly arranged frontward and rearward from the table center. The respective lower Y-axis guide rails are fixed parallel to the Y-axes. Driving mechanisms to move the housings of the respective units in their respective sliding directions are arranged. The moving table device is constituted such that respective upper guide rails are attached to the rear surface of the table via bearings. COPYRIGHT: (C)2004,JPO
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