SUBSTRATE FIXING APPARATUS AND SUBSTRATE PROCESSING APPARATUS BY USING THE SAME

摘要

PURPOSE: A substrate fixing apparatus and a substrate processing apparatus are provided to reduce a process badness generated at a boundary surface mismatched by vibration applied from the outside. CONSTITUTION: A combination surface(115) of the first stage piece(110) and a combination surface(125) of the second stage piece(120) have a curve for performing a protrusion and depression combination with each other, respectively. At the first combination surface(115), at least one protrusion member(115a) is formed and at the second combination surface(125) facing to the first combination surface(115), a combination groove member(125a) for combining with the protrusion member(115a) is formed.